- ÖÐÎÄ
- English
²úÆ·ÏÈÈÝ
PF-300T Astra ϵÁÐÊÇÎÒ¹«Ë¾×ÔÖ÷Ñз¢µÄÔ×Ó²ã³Á»ý£¨Atomic Layer Deposition£©×°±¸£¬£¬£¬£¬£¬£¬£¬¿ÉÉèÖÃ3¸ö2Õ¾µÄ·´Ó¦Ç»£¬£¬£¬£¬£¬£¬£¬ÏÖÒÑÓ¦ÓÃÓÚÏȽøµÄÐ¾Æ¬ÖÆÔì¼°ÏȽø·â×°£¨TSV£©ÁìÓò£¬£¬£¬£¬£¬£¬£¬Í¬Ê±Õë¶ÔÏȽøÖƳÌǰµÀ¹¤ÒÕ£¨FEOL£©¾ÙÐÐÑÐÖÆ¿ª·¢¡£¡£¡£¡£¡£¡£¡£ÏÖ¿ÉÌṩ¾ßÓиßÖÊÁ¿µÄPEALD SiO2¡¢SiN±¡Ä¤µÈ¡£¡£¡£¡£¡£¡£¡£